A nonlinear control strategy for robust tracking under exogenous vibrations for in-line nano-metrology
نویسندگان
چکیده
This paper proposes a novel, observer-based, nonlinear control strategy aimed at facilitating the pursuit of nanomechanical measurements within noisy environments industrial production lines. The investigation makes use laboratory-prototype emulating an architecture composed by sample to be analyzed, and metrology platform whose task is carry out in-line measurements, while whole system being affected exogenous vibrations. objective lock distance between sample, thereby allowing measurement task. proposed solution achieves robustness with respect unknown plant parameters disturbances means combination high-frequency high-gain tools, relying on novel “learning observer”. design formally then experimentally validated providing comparative study PID-based control-strategy. experimental results indicate, overall, favorable performance algorithm over PID counterpart.
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ژورنال
عنوان ژورنال: Automatica
سال: 2021
ISSN: ['1873-2836', '0005-1098']
DOI: https://doi.org/10.1016/j.automatica.2020.109302